Alicat Scientific’s mass flow controllers ensure the optimal coating environment in vacuum chambers, maintaining product integrity in coating and sputtering processes. The MCE-Series and MCV-Series may be used to replace legacy and discontinued MKS instruments. Made to fit the same space as common industry mass flow controllers, both series are easy to integrate into existing systems. In use, they offer fast, accurate flow control for process uniformity and quality.

The Alicat MCE and MCV accurately control gas flow rates as low as 0-0.5 sccm full scale or as high as 0-20 slpm full scale with control response times of 50 to 100 milliseconds. Fast response times can greatly improve vacuum coating end products and help eliminate target poisoning. The integrated pneumatic shut-off valve is normally closed, affording positive shut-off of 1 x 10-9 atm-sccm/sec Helium max.

The MCE can be used as a replacement of the legacy Type MKS 1179A Mass-Flo, while the MCV replaces the discontinued Type MKS 2179A Mass-Flo®. The Alicat mass flow controllers operate on universal 12-30 VDC supply, and Alicat will match any pre-existing pin out on 9-pin or 15-pin D-sub connectors, for easy replacement. The units can be mounted in any orientation, even upside-down, without recalibration, further simplifying installations.

Pre-programmed with calibrations for 98 gases, the MCE and MCV measure mass flow, volumetric flow, absolute pressure and temperature, with full temperature and pressure compensation. Units may be programmed directly through the instrument keypad or remotely via RS-232 (RS-485 also available).

The MCE and MCV use patented laminar flow differential pressure (DP) technology found in many Alicat Scientific flow instruments, are supplied with NIST traceable certification, and carry the CE mark.